@article{c94fb7dd116a4601a3428360538fcfe2,
title = "Stress and thermal characterization of 4H-SiC microelectromechanical structures",
keywords = "Micro-Raman, Microelectromechanical structure, Resistance thermometer, Silicon carbide, Temperature sensing",
author = "Colton Wells and Jiang, \{Jheng Yi\} and Chang, \{Ting Fu\} and Huang, \{Chih Fang\} and Jiaxin Ke and Weijun Luo and Guangrui Xia and Cheong, \{Kuan Yew\} and Feng Zhao",
note = "Publisher Copyright: {\textcopyright} 2016",
year = "2017",
month = mar,
day = "15",
doi = "10.1016/j.matlet.2016.12.064",
language = "English",
volume = "191",
pages = "196--199",
journal = "Materials Letters",
issn = "0167-577X",
}