Single crystalline 4H-SiC MEMS devices with N-P-N epitaxial structure

Feng Zhao; Allen Lim; Zhibang Chen; Chih Fang Huang

doi:10.1557/opl.2014.601

Single crystalline 4H-SiC MEMS devices with N-P-N epitaxial structure

Feng Zhao
, Allen Lim
, Zhibang Chen
, Chih Fang Huang

Washington State University Vancouver
National Tsing Hua University

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Journal	Materials Research Society Symposium Proceedings
Volume	1693
DOIs	https://doi.org/10.1557/opl.2014.601
State	Published - 2014
Externally published	Yes
Event	2014 MRS Spring Meeting - San Francisco, United States Duration: Apr 21 2014 → Apr 25 2014

ASJC Scopus Subject Areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Keywords

microelectro-mechanical (MEMS)
microstructure
sensor

Access to Document

10.1557/opl.2014.601

Cite this

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title = "Single crystalline 4H-SiC MEMS devices with N-P-N epitaxial structure",

keywords = "microelectro-mechanical (MEMS), microstructure, sensor",

author = "Feng Zhao and Allen Lim and Zhibang Chen and Huang, \{Chih Fang\}",

note = "Publisher Copyright: Copyright {\textcopyright} 2014 Materials Research Society.; 2014 MRS Spring Meeting ; Conference date: 21-04-2014 Through 25-04-2014",

year = "2014",

doi = "10.1557/opl.2014.601",

language = "English",

volume = "1693",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

}

TY - JOUR

T1 - Single crystalline 4H-SiC MEMS devices with N-P-N epitaxial structure

AU - Zhao, Feng

AU - Lim, Allen

AU - Chen, Zhibang

AU - Huang, Chih Fang

PY - 2014

Y1 - 2014

KW - microelectro-mechanical (MEMS)

KW - microstructure

KW - sensor

UR - https://www.scopus.com/pages/publications/84924565607

UR - https://www.scopus.com/pages/publications/84924565607#tab=citedBy

U2 - 10.1557/opl.2014.601

DO - 10.1557/opl.2014.601

M3 - Conference article

AN - SCOPUS:84924565607

SN - 0272-9172

VL - 1693

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

T2 - 2014 MRS Spring Meeting

Y2 - 21 April 2014 through 25 April 2014

ER -

Single crystalline 4H-SiC MEMS devices with N-P-N epitaxial structure

ASJC Scopus Subject Areas

Keywords

Access to Document

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