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Single crystalline 4H-polytype silicon carbide microresonator sensor for mass detection

  • Washington State University Vancouver

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)64-67
Number of pages4
JournalMaterials Letters
Volume128
DOIs
StatePublished - Aug 1 2014
Externally publishedYes

ASJC Scopus Subject Areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Keywords

  • Mass detection
  • Resonant frequency
  • Sensor
  • Silicon carbide
  • Single crystalline

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