Single-crystal SiC resonators by photoelectrochemical etching

Mohammad M. Islam; Chih Fang Huang; Feng Zhao

doi:10.4028/www.scientific.net/MSF.717-720.529

Single-crystal SiC resonators by photoelectrochemical etching

Mohammad M. Islam
, Chih Fang Huang
, Feng Zhao

University of South Carolina
National Tsing Hua University
Dept. of Civil and Environmental Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Silicon Carbide and Related Materials 2011, ICSCRM 2011
Editors	Robert P. Devaty, Michael Dudley, T. Paul Chow, Philip G. Neudeck
Publisher	Trans Tech Publications Ltd
Pages	529-532
Number of pages	4
ISBN (Print)	9783037854198
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.717-720.529
State	Published - 2012
Externally published	Yes
Event	14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011 - Cleveland, OH, United States Duration: Sep 11 2011 → Sep 16 2011

Publication series

Name	Materials Science Forum
Volume	717-720
ISSN (Print)	0255-5476
ISSN (Electronic)	1662-9752

Conference

Conference	14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011
Country/Territory	United States
City	Cleveland, OH
Period	9/11/11 → 9/16/11

ASJC Scopus Subject Areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Keywords

Photoelectrochemical etching
Resonator
SiC
Single crystal

Access to Document

10.4028/www.scientific.net/MSF.717-720.529

Cite this

Islam, M. M., Huang, C. F., & Zhao, F. (2012). Single-crystal SiC resonators by photoelectrochemical etching. In R. P. Devaty, M. Dudley, T. P. Chow, & P. G. Neudeck (Eds.), Silicon Carbide and Related Materials 2011, ICSCRM 2011 (pp. 529-532). (Materials Science Forum; Vol. 717-720). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.717-720.529

Single-crystal SiC resonators by photoelectrochemical etching. / Islam, Mohammad M.; Huang, Chih Fang; Zhao, Feng.
Silicon Carbide and Related Materials 2011, ICSCRM 2011. ed. / Robert P. Devaty; Michael Dudley; T. Paul Chow; Philip G. Neudeck. Trans Tech Publications Ltd, 2012. p. 529-532 (Materials Science Forum; Vol. 717-720).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Islam, MM, Huang, CF & Zhao, F 2012, Single-crystal SiC resonators by photoelectrochemical etching. in RP Devaty, M Dudley, TP Chow & PG Neudeck (eds), Silicon Carbide and Related Materials 2011, ICSCRM 2011. Materials Science Forum, vol. 717-720, Trans Tech Publications Ltd, pp. 529-532, 14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011, Cleveland, OH, United States, 9/11/11. https://doi.org/10.4028/www.scientific.net/MSF.717-720.529

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title = "Single-crystal SiC resonators by photoelectrochemical etching",

keywords = "Photoelectrochemical etching, Resonator, SiC, Single crystal",

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A2 - Devaty, Robert P.

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ER -

Single-crystal SiC resonators by photoelectrochemical etching

Publication series

Conference

ASJC Scopus Subject Areas

Keywords

Access to Document

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