Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem

Yue Huang; Andrew Mason; Aaron J. Greiner; Robert Y. Ofoli; R. Mark Worden

doi:10.1109/ICSENS.2007.355542

Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem

Yue Huang
, Andrew Mason
, Aaron J. Greiner
, Robert Y. Ofoli
, R. Mark Worden

Michigan State University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2006 5th IEEE Conference on Sensors
Pages	612-615
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2007.355542
State	Published - 2006
Externally published	Yes
Event	2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of Duration: Oct 22 2006 → Oct 25 2006

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	2006 5th IEEE Conference on Sensors
Country/Territory	Korea, Republic of
City	Daegu
Period	10/22/06 → 10/25/06

ASJC Scopus Subject Areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2007.355542

Cite this

Huang, Y, Mason, A, Greiner, AJ, Ofoli, RY & Mark Worden, R 2006, Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem. in 2006 5th IEEE Conference on Sensors., 4178694, Proceedings of IEEE Sensors, pp. 612-615, 2006 5th IEEE Conference on Sensors, Daegu, Korea, Republic of, 10/22/06. https://doi.org/10.1109/ICSENS.2007.355542

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title = "Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem",

author = "Yue Huang and Andrew Mason and Greiner, \{Aaron J.\} and Ofoli, \{Robert Y.\} and \{Mark Worden\}, R.",

year = "2006",

doi = "10.1109/ICSENS.2007.355542",

language = "English",

isbn = "1424403766",

series = "Proceedings of IEEE Sensors",

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AU - Huang, Yue

AU - Mason, Andrew

AU - Greiner, Aaron J.

AU - Ofoli, Robert Y.

AU - Mark Worden, R.

PY - 2006

Y1 - 2006

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U2 - 10.1109/ICSENS.2007.355542

DO - 10.1109/ICSENS.2007.355542

M3 - Conference contribution

AN - SCOPUS:50149117038

SN - 1424403766

SN - 9781424403769

T3 - Proceedings of IEEE Sensors

SP - 612

EP - 615

BT - 2006 5th IEEE Conference on Sensors

T2 - 2006 5th IEEE Conference on Sensors

Y2 - 22 October 2006 through 25 October 2006

ER -

Post-CMOS compatible microfabrication of a multi-analyte bioelectrochemical sensor array microsystem

Publication series

Conference

ASJC Scopus Subject Areas

Access to Document

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