Physical and chemical characterization of combinatorial metal gate electrode Ta-C-N library film

K. S. Chang; M. L. Green; I. Levin; J. R. Hattrick-Simpers; C. Jaye; D. A. Fischer; I. Takeuchi; S. De Gendt

doi:10.1063/1.3428788

Physical and chemical characterization of combinatorial metal gate electrode Ta-C-N library film

K. S. Chang
, M. L. Green
, I. Levin
, J. R. Hattrick-Simpers
, C. Jaye
, D. A. Fischer
, I. Takeuchi
, S. De Gendt

National Institute of Standards and Technology
University of Maryland, College Park
KU Leuven

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	192114
Journal	Applied Physics Letters
Volume	96
Issue number	19
DOIs	https://doi.org/10.1063/1.3428788
State	Published - 2010
Externally published	Yes

ASJC Scopus Subject Areas

Physics and Astronomy (miscellaneous)

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10.1063/1.3428788

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title = "Physical and chemical characterization of combinatorial metal gate electrode Ta-C-N library film",

author = "Chang, \{K. S.\} and Green, \{M. L.\} and I. Levin and Hattrick-Simpers, \{J. R.\} and C. Jaye and Fischer, \{D. A.\} and I. Takeuchi and \{De Gendt\}, S.",

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doi = "10.1063/1.3428788",

language = "English",

volume = "96",

journal = "Applied Physics Letters",

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T1 - Physical and chemical characterization of combinatorial metal gate electrode Ta-C-N library film

AU - Chang, K. S.

AU - Green, M. L.

AU - Levin, I.

AU - Hattrick-Simpers, J. R.

AU - Jaye, C.

AU - Fischer, D. A.

AU - Takeuchi, I.

AU - De Gendt, S.

PY - 2010

Y1 - 2010

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DO - 10.1063/1.3428788

M3 - Article

AN - SCOPUS:77952973396

SN - 0003-6951

VL - 96

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 19

M1 - 192114

ER -

Physical and chemical characterization of combinatorial metal gate electrode Ta-C-N library film

ASJC Scopus Subject Areas

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