@article{118c8de278394090b1c02812167bca28,
title = "Photoelectrochemical etching to fabricate single-crystal SiC MEMS for harsh environments",
keywords = "Biomedical sensing, High temperature, Microelectromechanical systems (MEMS), Photoelectrochemical etching, SiC, Single-crystal",
author = "Feng Zhao and Islam, \{Mohammad M.\} and Huang, \{Chih Fang\}",
year = "2011",
month = feb,
day = "15",
doi = "10.1016/j.matlet.2010.10.034",
language = "English",
volume = "65",
pages = "409--412",
journal = "Materials Letters",
issn = "0167-577X",
number = "3",
}