On the Effects of High-K Dielectric RESURF in High-Voltage Bulk FinFETs

Chia Hui Cheng; Jun Wei Lai; Kai Ting Hu; Chih Fang Huang; Feng Zhao

doi:10.1109/JEDS.2020.2997804

On the Effects of High-K Dielectric RESURF in High-Voltage Bulk FinFETs

Chia Hui Cheng
, Jun Wei Lai
, Kai Ting Hu
, Chih Fang Huang
, Feng Zhao

National Tsing Hua University
Washington State University Vancouver

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	9099861
Pages (from-to)	565-571
Number of pages	7
Journal	IEEE Journal of the Electron Devices Society
Volume	8
DOIs	https://doi.org/10.1109/JEDS.2020.2997804
State	Published - 2020
Externally published	Yes

ASJC Scopus Subject Areas

Biotechnology
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Keywords

Dielectric RESURF
FinFET
high-K
STI

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10.1109/JEDS.2020.2997804

Cite this

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title = "On the Effects of High-K Dielectric RESURF in High-Voltage Bulk FinFETs",

keywords = "Dielectric RESURF, FinFET, high-K, STI",

author = "Cheng, \{Chia Hui\} and Lai, \{Jun Wei\} and Hu, \{Kai Ting\} and Huang, \{Chih Fang\} and Feng Zhao",

note = "Publisher Copyright: {\textcopyright} 2013 IEEE.",

year = "2020",

doi = "10.1109/JEDS.2020.2997804",

language = "English",

volume = "8",

pages = "565--571",

journal = "IEEE Journal of the Electron Devices Society",

issn = "2168-6734",

}

TY - JOUR

T1 - On the Effects of High-K Dielectric RESURF in High-Voltage Bulk FinFETs

AU - Cheng, Chia Hui

AU - Lai, Jun Wei

AU - Hu, Kai Ting

AU - Huang, Chih Fang

AU - Zhao, Feng

PY - 2020

Y1 - 2020

KW - Dielectric RESURF

KW - FinFET

KW - high-K

KW - STI

UR - https://www.scopus.com/pages/publications/85087201072

UR - https://www.scopus.com/pages/publications/85087201072#tab=citedBy

U2 - 10.1109/JEDS.2020.2997804

DO - 10.1109/JEDS.2020.2997804

M3 - Article

AN - SCOPUS:85087201072

SN - 2168-6734

VL - 8

SP - 565

EP - 571

JO - IEEE Journal of the Electron Devices Society

JF - IEEE Journal of the Electron Devices Society

M1 - 9099861

ER -

On the Effects of High-K Dielectric RESURF in High-Voltage Bulk FinFETs

ASJC Scopus Subject Areas

Keywords

Access to Document

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