Micromachining of SiO2single crystal wafer using femtosecond laser

Micromachining of SiO₂single crystal wafer using femtosecond laser

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	022004
Journal	Journal of Laser Applications
Volume	35
Issue number	2
DOIs	https://doi.org/10.2351/7.0000877
State	Published - May 2023
Externally published	Yes

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title = "Micromachining of SiO2single crystal wafer using femtosecond laser",

author = "You Wang and Farhan Mumtaz and Yutang Dai",

note = "Publisher Copyright: {\textcopyright} 2023 Author(s).",

year = "2023",

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doi = "10.2351/7.0000877",

language = "English",

volume = "35",

journal = "Journal of Laser Applications",

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T1 - Micromachining of SiO2single crystal wafer using femtosecond laser

AU - Wang, You

AU - Mumtaz, Farhan

AU - Dai, Yutang

PY - 2023/5

Y1 - 2023/5

UR - https://www.scopus.com/pages/publications/85149837223

UR - https://www.scopus.com/pages/publications/85149837223#tab=citedBy

U2 - 10.2351/7.0000877

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M3 - Article

SN - 1042-346X

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JO - Journal of Laser Applications

JF - Journal of Laser Applications

IS - 2

M1 - 022004

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