Abstract
Aerosol-assisted chemical vapor deposition using the b-diketonate precursors Sr(tmhd)2•2H2O, Fe(tmhd)3 and Co(tmhd)3 was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFe1-yO3-d onto porous a-Al2O3 substrates. Single-phase SrCoyFe1-yO3-d perovskite films were obtained at a deposition temperature of 550°C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films. The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric-pressure, and led to a supported film which was leak-tight to N2 flow.
| Original language | American English |
|---|---|
| Journal | Journal of Materials Research |
| DOIs | |
| State | Published - Jan 1 1998 |
Keywords
- Ceramics
- Chemical Vapor Deposition (CVD)
- Thin Film
Disciplines
- Materials Science and Engineering
Fingerprint
Dive into the research topics of 'Metal-organic Chemical Vapor Deposition of Sr-Co-Fe-O Films on Porous Substrates'. Together they form a unique fingerprint.Cite this
- APA
- Standard
- Harvard
- Vancouver
- Author
- BIBTEX
- RIS