Integrated decoupling capacitors using Pb(Zr,Ti)O3 thin films

D. Dimos; S. J. Lockwood; T. J. Garino; H. N. Al-Shareef; R. W. Schwartz

doi:10.1557/proc-433-305

Integrated decoupling capacitors using Pb(Zr,Ti)O₃ thin films

D. Dimos
, S. J. Lockwood
, T. J. Garino
, H. N. Al-Shareef
, R. W. Schwartz

Sandia National Laboratories, New Mexico

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	305-316
Number of pages	12
Journal	Materials Research Society Symposium Proceedings
Volume	433
DOIs	https://doi.org/10.1557/proc-433-305
State	Published - 1996
Externally published	Yes
Event	Proceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA Duration: Apr 7 1996 → Apr 12 1996

ASJC Scopus Subject Areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Cite this

@article{39880a3dcfe841148715b92f31fccff8,

title = "Integrated decoupling capacitors using Pb(Zr,Ti)O3 thin films",

author = "D. Dimos and Lockwood, \{S. J.\} and Garino, \{T. J.\} and Al-Shareef, \{H. N.\} and Schwartz, \{R. W.\}",

year = "1996",

doi = "10.1557/proc-433-305",

language = "English",

volume = "433",

pages = "305--316",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

note = "Proceedings of the 1996 MRS Spring Symposium ; Conference date: 07-04-1996 Through 12-04-1996",

}

TY - JOUR

T1 - Integrated decoupling capacitors using Pb(Zr,Ti)O3 thin films

AU - Dimos, D.

AU - Lockwood, S. J.

AU - Garino, T. J.

AU - Al-Shareef, H. N.

AU - Schwartz, R. W.

PY - 1996

Y1 - 1996

UR - https://www.scopus.com/pages/publications/0030389543

UR - https://www.scopus.com/pages/publications/0030389543#tab=citedBy

U2 - 10.1557/proc-433-305

DO - 10.1557/proc-433-305

M3 - Conference article

AN - SCOPUS:0030389543

SN - 0272-9172

VL - 433

SP - 305

EP - 316

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

T2 - Proceedings of the 1996 MRS Spring Symposium

Y2 - 7 April 1996 through 12 April 1996

ER -

Integrated decoupling capacitors using Pb(Zr,Ti)O₃ thin films

ASJC Scopus Subject Areas

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