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Femtosecond Laser Processing of Transparent Materials for Assembly-Free Fabrication of Photonic Microsensors

  • Lei Yuan
  • , Yinan Zhang
  • , Jie Huang
  • , Jie Liu
  • , Yang Song
  • , Qi Zhang
  • , Jincheng Lei
  • , Hai Xiao
  • Missouri University of Science and Technology

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, we summarize our recent research progresses on the understanding, design, fabrication, characterization of various photonic sensors for energy, defense, environmental, biomedical and industry applications. Femtosecond laser processing/ablation of various glass materials (fused silica, doped silica, sapphire, etc.) will be discussed towards the goal of one-step fabrication of novel photonic sensors and new enabling photonic devices. A number of new photonic devices and sensors will be presented.

Keywords

  • Characterization
  • Fabrication
  • Femtosecond laser micromachining
  • Femtosecond laser processing
  • Fused silica
  • Glass
  • Glass materials
  • Industry applications
  • Laser applications
  • Manufacture
  • Microelectronics
  • Photonic devices
  • Photonic sensors
  • Recent researches
  • Sapphire
  • Silica
  • Transparent material, Laser materials processing
  • Ultrashort pulses, Doped silicas

Disciplines

  • Electrical and Computer Engineering

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