Effects of heat treatment on Ta2O5 sensing membrane for low drift and high sensitivity pH-ISFET

Dae Hyuk Kwona; Byung Woog Cho; Chang Soo Kim; Byung Ki Sohn

doi:10.1016/s0925-4005(96)01938-7

Effects of heat treatment on Ta₂O₅ sensing membrane for low drift and high sensitivity pH-ISFET

Dae Hyuk Kwona
, Byung Woog Cho
, Chang Soo Kim
, Byung Ki Sohn

Kyungpook National University

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	441-445
Number of pages	5
Journal	Sensors and Actuators, B: Chemical
Volume	34
Issue number	1-3
DOIs	https://doi.org/10.1016/s0925-4005(96)01938-7
State	Published - Aug 1996
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

Keywords

pH-ISFET
RF reactive sputtering
Sensing membrane
TaO

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10.1016/s0925-4005(96)01938-7

Cite this

@article{8465730de7614ccfb3faa6d8d84ccb69,

title = "Effects of heat treatment on Ta2O5 sensing membrane for low drift and high sensitivity pH-ISFET",

keywords = "pH-ISFET, RF reactive sputtering, Sensing membrane, TaO",

author = "Kwona, \{Dae Hyuk\} and Cho, \{Byung Woog\} and Kim, \{Chang Soo\} and Sohn, \{Byung Ki\}",

year = "1996",

month = aug,

doi = "10.1016/s0925-4005(96)01938-7",

language = "English",

volume = "34",

pages = "441--445",

journal = "Sensors and Actuators, B: Chemical",

issn = "0925-4005",

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T1 - Effects of heat treatment on Ta2O5 sensing membrane for low drift and high sensitivity pH-ISFET

AU - Kwona, Dae Hyuk

AU - Cho, Byung Woog

AU - Kim, Chang Soo

AU - Sohn, Byung Ki

PY - 1996/8

Y1 - 1996/8

KW - pH-ISFET

KW - RF reactive sputtering

KW - Sensing membrane

KW - TaO

UR - https://www.scopus.com/pages/publications/0042545876

UR - https://www.scopus.com/pages/publications/0042545876#tab=citedBy

U2 - 10.1016/s0925-4005(96)01938-7

DO - 10.1016/s0925-4005(96)01938-7

M3 - Article

AN - SCOPUS:0042545876

SN - 0925-4005

VL - 34

SP - 441

EP - 445

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 1-3

ER -

Effects of heat treatment on Ta₂O₅ sensing membrane for low drift and high sensitivity pH-ISFET

ASJC Scopus Subject Areas

Keywords

Access to Document

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