| Original language | English |
|---|---|
| Pages (from-to) | 322-331 |
| Number of pages | 10 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 101 |
| Issue number | 3 |
| DOIs | |
| State | Published - Oct 30 2002 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
Keywords
- Pre-load: domain
- Spring: stress-biased actuator
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