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Creep and hysteresis compensation for nanomanipulation using atomic force microscope

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)182-187
Number of pages6
JournalAsian Journal of Control
Volume11
Issue number2
DOIs
StatePublished - Mar 2009

ASJC Scopus Subject Areas

  • Control and Systems Engineering
  • Mathematics (miscellaneous)
  • Electrical and Electronic Engineering

Keywords

  • AFM
  • Creep and hysteresis compensation
  • Dynamic inversion
  • Nanomanipulation

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