Characterization for N- and P-type 3C-SiC on Si (1 0 0) substrate with thermal anneal and pulsed excimer laser anneal

Kung Yen Lee; Yu Hao Chang; Yan Hao Huang; Chih Fang Huang; Cheng Yueh Chung; Feng Zhao

doi:10.1016/j.apsusc.2012.11.059

Characterization for N- and P-type 3C-SiC on Si (1 0 0) substrate with thermal anneal and pulsed excimer laser anneal

Kung Yen Lee
, Yu Hao Chang
, Yan Hao Huang
, Chih Fang Huang
, Cheng Yueh Chung
, Feng Zhao

National Taiwan University
National Tsing Hua University
Washington State University Vancouver

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	46-50
Number of pages	5
Journal	Applied Surface Science
Volume	266
DOIs	https://doi.org/10.1016/j.apsusc.2012.11.059
State	Published - Feb 1 2013
Externally published	Yes

ASJC Scopus Subject Areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Keywords

3C-SiC
Anneal
FTIR
Pulsed excimer laser
Raman
XRD

Access to Document

10.1016/j.apsusc.2012.11.059

Cite this

@article{db54443d053b4f12b7848e5f44150a70,

title = "Characterization for N- and P-type 3C-SiC on Si (1 0 0) substrate with thermal anneal and pulsed excimer laser anneal",

keywords = "3C-SiC, Anneal, FTIR, Pulsed excimer laser, Raman, XRD",

author = "Lee, \{Kung Yen\} and Chang, \{Yu Hao\} and Huang, \{Yan Hao\} and Huang, \{Chih Fang\} and Chung, \{Cheng Yueh\} and Feng Zhao",

year = "2013",

month = feb,

day = "1",

doi = "10.1016/j.apsusc.2012.11.059",

language = "English",

volume = "266",

pages = "46--50",

journal = "Applied Surface Science",

issn = "0169-4332",

}

TY - JOUR

T1 - Characterization for N- and P-type 3C-SiC on Si (1 0 0) substrate with thermal anneal and pulsed excimer laser anneal

AU - Lee, Kung Yen

AU - Chang, Yu Hao

AU - Huang, Yan Hao

AU - Huang, Chih Fang

AU - Chung, Cheng Yueh

AU - Zhao, Feng

PY - 2013/2/1

Y1 - 2013/2/1

KW - 3C-SiC

KW - Anneal

KW - FTIR

KW - Pulsed excimer laser

KW - Raman

KW - XRD

UR - https://www.scopus.com/pages/publications/84872813763

UR - https://www.scopus.com/pages/publications/84872813763#tab=citedBy

U2 - 10.1016/j.apsusc.2012.11.059

DO - 10.1016/j.apsusc.2012.11.059

M3 - Article

AN - SCOPUS:84872813763

SN - 0169-4332

VL - 266

SP - 46

EP - 50

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Characterization for N- and P-type 3C-SiC on Si (1 0 0) substrate with thermal anneal and pulsed excimer laser anneal

ASJC Scopus Subject Areas

Keywords

Access to Document

Other files and links

Fingerprint

Cite this