| Original language | English |
|---|---|
| Pages (from-to) | 1663-1668 |
| Number of pages | 6 |
| Journal | Microsystem Technologies |
| Volume | 21 |
| Issue number | 8 |
| DOIs | |
| State | Published - Aug 24 2015 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering
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