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Bidirectional and location-dependent frequency tuning of single crystal 4H-SiC micromechanical cantilevers

  • Washington State University Vancouver

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1663-1668
Number of pages6
JournalMicrosystem Technologies
Volume21
Issue number8
DOIs
StatePublished - Aug 24 2015
Externally publishedYes

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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