TY - JOUR
T1 - Advanced techniques in quartz wafer precision processing
T2 - Stealth dicing based on filament-induced laser machining
AU - Wang, Yun
AU - Dai, Yutang
AU - Mumtaz, Farhan
AU - Luo, Kaiyan
N1 - Publisher Copyright:
© 2023 Elsevier Ltd
PY - 2024/4/1
Y1 - 2024/4/1
KW - Femtosecond laser machining
KW - Filament-induced laser machining
KW - Quartz crystals
KW - Stealth dicing
UR - https://scholarsmine.mst.edu/ele_comeng_facwork/5191
UR - https://doi.org/10.1016/j.optlastec.2023.110474
UR - https://www.scopus.com/pages/publications/85180363212
UR - https://www.scopus.com/pages/publications/85180363212#tab=citedBy
UR - https://www.mendeley.com/catalogue/7a7e8371-4654-3ac8-8a4f-6e7f543bee90/
U2 - 10.1016/j.optlastec.2023.110474
DO - 10.1016/j.optlastec.2023.110474
M3 - Article
SN - 0030-3992
VL - 171
JO - Optics and Laser Technology
JF - Optics and Laser Technology
M1 - 110474
ER -