A Novel Thin Film Transistor Using Double Amorphous Silicon Active Layer

Jong Hyuni Choi; Chang-Soo Kim; Byung Cheon Lim; Jin Jang

doi:10.1109/16.711377

A Novel Thin Film Transistor Using Double Amorphous Silicon Active Layer

Jong Hyuni Choi
, Chang-Soo Kim
, Byung Cheon Lim
, Jin Jang

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

We have fabricated a novel low off-state leakage current thin-film transistor (TFT) using a chlorine incorporated amorphous silicon [a-Si:H(:Cl)] and amorphous silicon (a-Si:H) stacked active layer, in which conduction channel is formed in a-Si:H and a-Si:H(:Cl) is photo-insensitive material. The off-state photo-leakage current of the a-Si:H(:Cl)/a-Si:H TFT is much lower than that a conventional a-Si:H TFT.

Original language	American English
Journal	IEEE Transactions on Electron Devices
DOIs	https://doi.org/10.1109/16.711377
State	Published - Jan 1 1998

Keywords

Amorphous Semiconductors
Cl-Si:H
Double Amorphous Silicon Stacked Active Layer
Elemental Semiconductors
Leakage Currents
Off-State Photo-Leakage Current
Si:H
Silicon
Thin Film Transistor
Thin Film Transistors

Disciplines

Biology
Electrical and Computer Engineering

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@article{e2933678d5b8439fb332580484ab0ae0,

title = "A Novel Thin Film Transistor Using Double Amorphous Silicon Active Layer",

abstract = " We have fabricated a novel low off-state leakage current thin-film transistor (TFT) using a chlorine incorporated amorphous silicon [a-Si:H(:Cl)] and amorphous silicon (a-Si:H) stacked active layer, in which conduction channel is formed in a-Si:H and a-Si:H(:Cl) is photo-insensitive material. The off-state photo-leakage current of the a-Si:H(:Cl)/a-Si:H TFT is much lower than that a conventional a-Si:H TFT.",

keywords = "Amorphous Semiconductors, Cl-Si:H, Double Amorphous Silicon Stacked Active Layer, Elemental Semiconductors, Leakage Currents, Off-State Photo-Leakage Current, Si:H, Silicon, Thin Film Transistor, Thin Film Transistors",

author = "Choi, \{Jong Hyuni\} and Chang-Soo Kim and Lim, \{Byung Cheon\} and Jin Jang",

year = "1998",

month = jan,

day = "1",

doi = "10.1109/16.711377",

language = "American English",

journal = "IEEE Transactions on Electron Devices",

issn = "1557-9646",

}

TY - JOUR

T1 - A Novel Thin Film Transistor Using Double Amorphous Silicon Active Layer

AU - Choi, Jong Hyuni

AU - Kim, Chang-Soo

AU - Lim, Byung Cheon

AU - Jang, Jin

PY - 1998/1/1

Y1 - 1998/1/1

N2 - We have fabricated a novel low off-state leakage current thin-film transistor (TFT) using a chlorine incorporated amorphous silicon [a-Si:H(:Cl)] and amorphous silicon (a-Si:H) stacked active layer, in which conduction channel is formed in a-Si:H and a-Si:H(:Cl) is photo-insensitive material. The off-state photo-leakage current of the a-Si:H(:Cl)/a-Si:H TFT is much lower than that a conventional a-Si:H TFT.

AB - We have fabricated a novel low off-state leakage current thin-film transistor (TFT) using a chlorine incorporated amorphous silicon [a-Si:H(:Cl)] and amorphous silicon (a-Si:H) stacked active layer, in which conduction channel is formed in a-Si:H and a-Si:H(:Cl) is photo-insensitive material. The off-state photo-leakage current of the a-Si:H(:Cl)/a-Si:H TFT is much lower than that a conventional a-Si:H TFT.

KW - Amorphous Semiconductors

KW - Cl-Si:H

KW - Double Amorphous Silicon Stacked Active Layer

KW - Elemental Semiconductors

KW - Leakage Currents

KW - Off-State Photo-Leakage Current

KW - Si:H

KW - Silicon

KW - Thin Film Transistor

KW - Thin Film Transistors

UR - https://scholarsmine.mst.edu/ele_comeng_facwork/816

U2 - 10.1109/16.711377

DO - 10.1109/16.711377

M3 - Article

SN - 1557-9646

JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

ER -

A Novel Thin Film Transistor Using Double Amorphous Silicon Active Layer

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