A novel etching technique for crystallographic study of SiC materials

Feng Zhao; Kevin Daniels; Zegilor Laney; Tangali S. Sudarshan

doi:10.1109/ISDRS.2009.5378289

A novel etching technique for crystallographic study of SiC materials

Feng Zhao
, Kevin Daniels
, Zegilor Laney
, Tangali S. Sudarshan

University of South Carolina

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2009 International Semiconductor Device Research Symposium, ISDRS '09
DOIs	https://doi.org/10.1109/ISDRS.2009.5378289
State	Published - 2009
Externally published	Yes
Event	2009 International Semiconductor Device Research Symposium, ISDRS '09 - College Park, MD, United States Duration: Dec 9 2009 → Dec 11 2009

Publication series

Name	2009 International Semiconductor Device Research Symposium, ISDRS '09

Conference

Conference	2009 International Semiconductor Device Research Symposium, ISDRS '09
Country/Territory	United States
City	College Park, MD
Period	12/9/09 → 12/11/09

ASJC Scopus Subject Areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

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10.1109/ISDRS.2009.5378289

Cite this

Zhao, F, Daniels, K, Laney, Z & Sudarshan, TS 2009, A novel etching technique for crystallographic study of SiC materials. in 2009 International Semiconductor Device Research Symposium, ISDRS '09., 5378289, 2009 International Semiconductor Device Research Symposium, ISDRS '09, 2009 International Semiconductor Device Research Symposium, ISDRS '09, College Park, MD, United States, 12/9/09. https://doi.org/10.1109/ISDRS.2009.5378289

@inproceedings{02389c97ddf74f528006cd10aeff5590,

title = "A novel etching technique for crystallographic study of SiC materials",

author = "Feng Zhao and Kevin Daniels and Zegilor Laney and Sudarshan, \{Tangali S.\}",

year = "2009",

doi = "10.1109/ISDRS.2009.5378289",

language = "English",

isbn = "9781424460304",

series = "2009 International Semiconductor Device Research Symposium, ISDRS '09",

booktitle = "2009 International Semiconductor Device Research Symposium, ISDRS '09",

note = "2009 International Semiconductor Device Research Symposium, ISDRS '09 ; Conference date: 09-12-2009 Through 11-12-2009",

}

TY - GEN

T1 - A novel etching technique for crystallographic study of SiC materials

AU - Zhao, Feng

AU - Daniels, Kevin

AU - Laney, Zegilor

AU - Sudarshan, Tangali S.

PY - 2009

Y1 - 2009

UR - https://www.scopus.com/pages/publications/77949374181

UR - https://www.scopus.com/pages/publications/77949374181#tab=citedBy

U2 - 10.1109/ISDRS.2009.5378289

DO - 10.1109/ISDRS.2009.5378289

M3 - Conference contribution

AN - SCOPUS:77949374181

SN - 9781424460304

T3 - 2009 International Semiconductor Device Research Symposium, ISDRS '09

BT - 2009 International Semiconductor Device Research Symposium, ISDRS '09

T2 - 2009 International Semiconductor Device Research Symposium, ISDRS '09

Y2 - 9 December 2009 through 11 December 2009

ER -

A novel etching technique for crystallographic study of SiC materials

Publication series

Conference

ASJC Scopus Subject Areas

Access to Document

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