A comparison of diol and methanol-based chemical solution deposition routes for PZT thin film fabrication

Robert W. Schwartz; Tammy L. Reichert; Paul G. Clem; Duane Dimos; David Liu

doi:10.1080/10584589708221705

A comparison of diol and methanol-based chemical solution deposition routes for PZT thin film fabrication

Robert W. Schwartz
, Tammy L. Reichert
, Paul G. Clem
, Duane Dimos
, David Liu

Sandia National Laboratories, New Mexico
AVX Corporation

Research output: Contribution to journal › Review article › peer-review

Original language	English
Pages (from-to)	275-286
Number of pages	12
Journal	Integrated Ferroelectrics
Volume	18
Issue number	1-4
DOIs	https://doi.org/10.1080/10584589708221705
State	Published - 1997
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Control and Systems Engineering
Ceramics and Composites
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Keywords

CSD
Decoupling capacitors
Diol
PZT
Thick coatings

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10.1080/10584589708221705

Cite this

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title = "A comparison of diol and methanol-based chemical solution deposition routes for PZT thin film fabrication",

keywords = "CSD, Decoupling capacitors, Diol, PZT, Thick coatings",

author = "Schwartz, \{Robert W.\} and Reichert, \{Tammy L.\} and Clem, \{Paul G.\} and Duane Dimos and David Liu",

year = "1997",

doi = "10.1080/10584589708221705",

language = "English",

volume = "18",

pages = "275--286",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

number = "1-4",

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TY - JOUR

T1 - A comparison of diol and methanol-based chemical solution deposition routes for PZT thin film fabrication

AU - Schwartz, Robert W.

AU - Reichert, Tammy L.

AU - Clem, Paul G.

AU - Dimos, Duane

AU - Liu, David

PY - 1997

Y1 - 1997

KW - CSD

KW - Decoupling capacitors

KW - Diol

KW - PZT

KW - Thick coatings

UR - https://www.scopus.com/pages/publications/0031381709

UR - https://www.scopus.com/pages/publications/0031381709#tab=citedBy

U2 - 10.1080/10584589708221705

DO - 10.1080/10584589708221705

M3 - Review article

AN - SCOPUS:0031381709

SN - 1058-4587

VL - 18

SP - 275

EP - 286

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1-4

ER -

A comparison of diol and methanol-based chemical solution deposition routes for PZT thin film fabrication

ASJC Scopus Subject Areas

Keywords

Access to Document

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