4H-SiC electrostatic microactuator with optically controlled actuation

Feng Zhao; Marcus Daniel Trimble

doi:10.1007/s00542-017-3305-0

4H-SiC electrostatic microactuator with optically controlled actuation

Feng Zhao
, Marcus Daniel Trimble

Washington State University Vancouver

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	5631-5634
Number of pages	4
Journal	Microsystem Technologies
Volume	23
Issue number	12
DOIs	https://doi.org/10.1007/s00542-017-3305-0
State	Published - Dec 1 2017
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1007/s00542-017-3305-0

Cite this

@article{423b8fcb49e944bd94ba7faea943f209,

title = "4H-SiC electrostatic microactuator with optically controlled actuation",

author = "Feng Zhao and Trimble, \{Marcus Daniel\}",

note = "Publisher Copyright: {\textcopyright} 2017, Springer-Verlag Berlin Heidelberg.",

year = "2017",

month = dec,

day = "1",

doi = "10.1007/s00542-017-3305-0",

language = "English",

volume = "23",

pages = "5631--5634",

journal = "Microsystem Technologies",

issn = "0946-7076",

number = "12",

}

TY - JOUR

T1 - 4H-SiC electrostatic microactuator with optically controlled actuation

AU - Zhao, Feng

AU - Trimble, Marcus Daniel

PY - 2017/12/1

Y1 - 2017/12/1

UR - https://www.scopus.com/pages/publications/85011310910

UR - https://www.scopus.com/pages/publications/85011310910#tab=citedBy

U2 - 10.1007/s00542-017-3305-0

DO - 10.1007/s00542-017-3305-0

M3 - Article

AN - SCOPUS:85011310910

SN - 0946-7076

VL - 23

SP - 5631

EP - 5634

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 12

ER -

4H-SiC electrostatic microactuator with optically controlled actuation

ASJC Scopus Subject Areas

Access to Document

Other files and links

Fingerprint

Cite this